In-TFT-Array-Process Micro Defect Inspection Using Nonlinear Principal Component Analysis
نویسندگان
چکیده
منابع مشابه
In-TFT-Array-Process Micro Defect Inspection Using Nonlinear Principal Component Analysis
Defect inspection plays a critical role in thin film transistor liquid crystal display (TFT-LCD) manufacture, and has received much attention in the field of automatic optical inspection (AOI). Previously, most focus was put on the problems of macro-scale Mura-defect detection in cell process, but it has recently been found that the defects which substantially influence the yield rate of LCD pa...
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ژورنال
عنوان ژورنال: International Journal of Molecular Sciences
سال: 2009
ISSN: 1422-0067
DOI: 10.3390/ijms10104498